Metal piezoelectric semiconductor field effect transistors for piezoelectric strain sensors
نویسندگان
چکیده
منابع مشابه
Metal piezoelectric semiconductor field effect transistors for piezoelectric strain sensors
In this letter, we examine the potential of a functional device that can have good transistor and stress sensor properties. The device examined is based on the use of a thin oxide with high piezoelectric coefficients under the gate region. Channel charge and current are controlled by gate voltage or by stress. We examine the performance of two classes of heterostructures that are important semi...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2004
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1784039